Shuji Tanaka received B.E., M.E. and Dr.E. degrees in mechanical engineering from The University of Tokyo in 1994, 1996, and 1999, respectively. He was a Research Associate at Department of Mechatronics and Precision Engineering, Tohoku University from 1999 to 2001, an Assistant Professor from 2001 to 2003, and an Associate Professor at Department of Nanomechanics from 2003 to 2013. He is currently a Professor at Department of Robotics and Microsystem Integration Center. He was also a Fellow of Center for Research and Development Strategy, Japan Science and Technology Agency (JST) from 2004 to 2006, and a Selected Fellow from 2006 to 2018. His research interests include MEMS, acoustic wave devices, wafer-level packaging and integration, and piezoelectric devices and materials.