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Capacitive Micromachined Ultrasonic Transducers: Next-Generation Arrays for Acoustic Imaging?

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 49, no. 11, pp. 1596-1610, Nov. 2002, doi: 10.1109/TUFFC.2002.1049742.

USA
Ömer Oralkan
North Carolina State University
Region 03 (Southeastern U.S.)
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