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An acoustic micrometer and its application to layer thickness measurements

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Author(s)
Author(s)
Y. Tsukahara, N. Nakaso, Jun-ichi Kushibiki and Noriyoshi Chubachi

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 36, no. 3, pp. 326-331, May 1989, doi: 10.1109/58.19171.