An acoustic micrometer and its application to layer thickness measurements | IEEE UFFC

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An acoustic micrometer and its application to layer thickness measurements

Yusuke Tsukahara,; Noritaka Nakaso; Jun-ichi Kushibiki; Noriyoshi Chubachi

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 36, no. 3, pp. 326-331, May 1989, doi: 10.1109/58.19171.

Yusuke Tsukahara,

Noritaka Nakaso

JPN

Jun-ichi Kushibiki

Tohoku University

Region 10 (Asia and Pacific)

Noriyoshi Chubachi