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Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates

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Author(s)
J. Knight, J. McLean and F. Levent Degertekin

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 51, no. 10, pp. 1324-1333, Oct. 2004, doi: 10.1109/TUFFC.2004.1350961.