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MEMS technology for timing and frequency control

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 54, no. 2, pp. 251-270, February 2007, doi: 10.1109/TUFFC.2007.240.

USA
Clark T.-C. Nguyen
University of California, Berkeley
Region 06 (Western U.S.)
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