Randy Kubena

Randy Kubena

Affiliation
Materials and Microsystems Laboratory HRL Laboratories LLC
IEEE Region
Region 06 (Western U.S.)
(
Country
US
)

Randall L. Kubena (M’10–SM’17) received the B.S. degree in physics and the M.S. and Ph.D. degrees in applied physics from the California Institute of Technology, Pasadena, CA, USA.,In 1978, he joined HRL Laboratories, LLC, Malibu, CA, USA, where he was a Co-Inventor of Ga+ focused-ion-beam technology that is now widely used in the semiconductor industry. He has also been active in the fields of ion source physics, charge particle beam optics, beam-assisted surface science, nanofabrication, quantum device fabrication, and since 1993, MEMS development for GM, Raytheon, and Boeing. He served as a Department Manager for nanotechnology/MEMS from 1990 to 2006 and is currently functioning as both the PI and Program Manager for Quartz MEMS Technology and as a Principal Research Scientist, HRL. He has authored or co-authored over 130 technical papers and holds 64 patents in the field of micro-/nanofabrication and MEMS. His current research interests include high-performance inertial devices, oscillators, filters, nonlinear dynamics, and high- $Q$ HF—UHF quartz resonator arrays for RF sensors.,Dr. Kubena is currently with the Advisory Board of the IEEE Electron, Ion, Photon, and Nanofabrication Conference and the Technical Program Committee of the IEEE Frequency Control Symposium.(Based on document published on 22 December 2017).